LEO DSM 1530 Field Emission Scanning Electron Microscope

The LEO 1530 is a state-of-the-art Scanning Electron Microscope (SEM) which uses a Schottky-type field-emission electron source. A beam booster is used to maintain optimum electron optical performance at all accelerating voltages. In addition, the patented Gemini optical column has no crossovers and utilizes a magnetic/electrostatic objective lens for outstanding imaging capabilities, especially at low voltage (due to reduced chromatic aberration).


Equiptment
     Secondary Electron Detectors (SE)
  • conventional Everhart-Thornley detector in the chamber
  • In-lens detector, which utilizes secondary electrons, captured by the objective lens field providing excellent surface detail
     Backscattered Electron Detector (BSE)
  • optimized for low voltage operation
     Energy Dispersive Analysis System (EDS)
  • Contains a state-of-the-art detector with a resolution of 129 eV at Manganese and a light element detection limit of Boron
     Electron Backscattered Kikuchi Pattern Detector (EBKP)
  • can collect patterns, analyze and store the data at the rate of one point every two seconds
  • allowins an array of 27,000 points to be analyzed in a typical 15 hour period


Performance Specifications
     Superb image resolution
  • rated resolution is 1.2 nm at 20 kV
  • 2.5 nm at 5 kV
  • 40 nm at 1 kV
     Designed to perform EDS analysis, BSE imaging and high resolution SE imaging
  • standard working distance of (8 mm)
  • allows up to 45° of tilt
     EDS system has a state-of-the-art detector
  • resolution of 129 eV at Manganese
  • a light element detection limit of Boron


Contact Person: Richard Noll, Manager of the SEM Facility.
Charge structure: All Charges are per hour

Instrument Use

  • $34 - Clients from the University of Wisconsin System.
  • $44 – Clients from non-UW Universities.
  • $119 – Clients from Industry.

Tech Support

  • $35 - Clients from the University of Wisconsin System.
  • $49 – Clients from non-UW Universities.
  • $139 – Clients from Industry.