Auriga Focused Ion Beam FE SEM
Combining the ultra high resolution GEMINI® field emission column with the high performance Canion FIB column into one integrated system, the 1540XB CrossBeam® workstation is the perfect solution for three dimensional analysis with no compromises on SEM imaging capabilities. The live SEM imaging capability of the 1540XB CrossBeam® during FIB operation mode gives full control when analyzing critical samples. The stage is fully mechanically eucentric with compucentric rotate and tilt capability, allowing easy sample setup for SEM imaging or Focused Ion Beam work. The 1500XB CrossBeam® series offers a comprehensive and versatile multi-channel gas injection system for ion beam deposition of metals or insulators and for enhanced etching. A wealth of options exist on the MSC system including a 5 gas injector system, an in situ micromanipulator, and SE, Inlens SE, Inlens BSE, STEM and EDS detectors.