Zeiss Auriga Focused Ion Beam FE SEM
Combining the ultra high resolution GEMINI® field emission SEM column with the high performance Cobra FIB column into one integrated system, the Auriga® workstation is the perfect solution for three dimensional analysis with no compromises on SEM imaging capabilities. The live SEM imaging capability of the Auriga® during FIB operation mode gives full control when micro-machining critical samples. The stage is fully mechanically eucentric with compucentric rotate and tilt capability, allowing easy sample setup for SEM imaging or Focused Ion Beam work. The Auriga® series offers a comprehensive and versatile multi-channel gas injection system for ion beam deposition of metals or insulators and for enhanced etching. A wealth of options exist on the MSC system including a 5 gas injection system, as well as a single high angle gas injector for 0 degree, an in situ micromanipulator, and SE, Inlens SE, Inlens BSE, STEM and EDS detectors.